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Influence of Metal Surface Characteristics on Auto Focus Reference Position and Pattern Fidelity in Fine-Pitch RDL Applications

Title: Influence of Metal Surface Characteristics on Auto Focus Reference Position and Pattern Fidelity in Fine-Pitch RDL Applications
Authors: Chang, Jaehyuk; Yang, Hyunseok; Chang, Youmin; Choi, Seokhun; Hwang, Kyung Chan; Park, Chanjin; Kang, Mingu; Zhang, Zhongchuan; Su, Chang I; Fu, Wen; Chuang, CC; Wang, Yingchiao
Source: 2026 IEEE 76th Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2026 IEEE 76th. :605-609 May, 2026
Relation: 2026 IEEE 76th Electronic Components and Technology Conference (ECTC)
Database: IEEE Xplore Digital Library