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Hierarchical 3D-Vertically staking with Multi-layer and Stacking with Novel Structure by Transferrable Cu/polymer Hybrid Bonding and 3D-Vertically Stacking For High speed Digital Applications

Title: Hierarchical 3D-Vertically staking with Multi-layer and Stacking with Novel Structure by Transferrable Cu/polymer Hybrid Bonding and 3D-Vertically Stacking For High speed Digital Applications
Authors: Lee, Ou-Hsiang; Chan, Yu-Ping; Chiu, Wei-Lan; Chang, Hsiang-Hung; Chiang, Chia-Wen; Peng, Jr-Wei; Chen, Meng-Hsuan; Chen, Kuan-Neng; Lin, Jia-Rui; Chang, Liang-Cyuan; Fan, Jia-Wen; Chien, Da-Cheng; OuYang, Tsung-Yu; Wang, Chin-Hung; Lo, Wei-Chung; Lee, Chia-Hsin; Tan, Chung-An; Chang, Shih-Chieh
Source: 2026 IEEE 76th Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2026 IEEE 76th. :2035-2041 May, 2026
Relation: 2026 IEEE 76th Electronic Components and Technology Conference (ECTC)
Database: IEEE Xplore Digital Library