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A Product-Oriented 3rd-Generation 2nm GAA Platform Technology with Enhanced Speed and Power Efficiency across Nanosheets

Title: A Product-Oriented 3rd-Generation 2nm GAA Platform Technology with Enhanced Speed and Power Efficiency across Nanosheets
Authors: Park, Seulki; Jeong, Dongchan; Lee, Sanghoon; Kim, Seungkwon; Lee, Minseong; Choi, Byungha; Masuoka, Sada-Aki; Sohn, Chang-Woo; Kim, Sung Won; Jung, Younghun; Kim, Taeyoung; Kim, Ju-Youn; Park, Kichul; Kim, Hyunjo; Jeong, Jaehun; Kang, Hee Sung; Yasuda-Masuoka, Yuri; Ku, Ja-Hum
Source: 2026 IEEE/JSAP Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) VLSI Technology and Circuits (VLSI Technology and Circuits), 2026 IEEE/JSAP Symposium on. :1-3 Jun, 2026
Relation: 2026 IEEE/JSAP Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
Database: IEEE Xplore Digital Library