| Title: |
Secondary DOF and their effect on the instability of electrostatic MEMS devices |
| Authors: |
Elata, D.; Bochobza-Degani, O.; Feldman, S.; Nemirovsky, Y. |
| Source: |
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE Micro electro mechanical systems Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on. :177-180 2003 |
| Relation: |
Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems |
| Database: |
IEEE Xplore Digital Library |