| Title: |
Tunable resonators with electrostatic self test functionality for frequency selective vibration measurements |
| Authors: |
Scheibner, D.; Mehner, J.; Reuter, D.; Gessner, T.; Dotzel, W. |
| Source: |
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE Micro electro mechanical systems Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on. :526-529 2003 |
| Relation: |
Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems |
| Database: |
IEEE Xplore Digital Library |