| Title: |
A low-cost CMOS compatible serpentine-structured polysilicon-based microbolometer array |
| Authors: |
Socher, E.; Sinai, Y.; Nemirovsky, Y. |
| Source: |
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Solid-state sensors, actuators and microsystems TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. 1:320-323 vol.1 2003 |
| Relation: |
IEEE International Solid-State Sensors and Actuators Conference |
| Database: |
IEEE Xplore Digital Library |