| Title: |
Characterization of a novel micromachined accelerometer with enhanced-MIDOS |
| Authors: |
Bochobza-Degani, O.; Yechieli, R.; Bar-Lev, S.; Yehuda, U.B.; Nemirovsky, Y. |
| Source: |
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Solid-state sensors, actuators and microsystems TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. 2:1395-1398 vol.2 2003 |
| Relation: |
IEEE International Solid-State Sensors and Actuators Conference |
| Database: |
IEEE Xplore Digital Library |