| Title: |
Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers |
| Authors: |
Stahl, H.; Hoechst, A.; Fischer, F.; Metzger, L.; Reichenbach, R.; Laermer, F.; Kronmueller, S.; Breitschwerdt, K.; Gunn, R.; Watcham, S.; Rusu, C.; Witvrouw, A. |
| Source: |
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Solid-state sensors, actuators and microsystems TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. 2:1899-1902 vol.2 2003 |
| Relation: |
IEEE International Solid-State Sensors and Actuators Conference |
| Database: |
IEEE Xplore Digital Library |