| Title: |
TCAD modeling and experimental investigation of indium for advanced CMOS technology |
| Authors: |
Graoui, H.; Al-Bayati, A.; Erlebach, A.; Zechner, C.; Benistant, F.; Allen, A.; Banks, P.; Murrell, A. |
| Source: |
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on Ion implantation technology proceedings Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on. :126-130 2002 |
| Relation: |
Proceedings of the 2002 14th International Conference on Ion Implantation Technology |
| Database: |
IEEE Xplore Digital Library |