| Title: |
Comparison of indium metrology using LEXES and SIMS [semiconductor doping] |
| Authors: |
Kouzminov, D.; Yupu Li; Hunter, J.; Graoui, H.; Al-Bayati, A.; Foad, M.; Staub, P.; Hombourger, C.; Schuhmacher, M. |
| Source: |
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on Ion implantation technology proceedings Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on. :338-341 2002 |
| Relation: |
Proceedings of the 2002 14th International Conference on Ion Implantation Technology |
| Database: |
IEEE Xplore Digital Library |