| Title: |
SIMS depth profiling and SRIM simulation to lower energy antimony implantation into silicon |
| Authors: |
Yupu Li; Shyue, J.; Hunter, J.; McComb, B.; Chun, M.; Doherty, R.; Foad, M. |
| Source: |
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on Ion implantation technology proceedings Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on. :625-628 2002 |
| Relation: |
Proceedings of the 2002 14th International Conference on Ion Implantation Technology |
| Database: |
IEEE Xplore Digital Library |