| Title: |
High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy |
| Authors: |
Eyben, P.; Fukutome, H.; Alvarez, D.; Vandervorst, W. |
| Source: |
Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850) Solid-state device research conference Solid-State Device Research Conference, 2004. ESSDERC 2004. Proceeding of the 34th European. :101-104 2004 |
| Relation: |
Proceedings of the 34th European Solid-State Device Research Conference |
| Database: |
IEEE Xplore Digital Library |