Silicon single crystalline MEMS shunt contact switch for RF application
| Title: | Silicon single crystalline MEMS shunt contact switch for RF application |
|---|---|
| Authors: | Aharon, O.; Feldman, S.; Nemirovsky, Y. |
| Source: | 2004 23rd IEEE Convention of Electrical and Electronics Engineers in Israel Electrical and electronics engineers in Israel Electrical and Electronics Engineers in Israel, 2004. Proceedings. 2004 23rd IEEE Convention of. :281-284 2004 |
| Relation: | 2004 23rd IEEE Convention of Electrical and Electronics Engineers in Israel |
| Database: | IEEE Xplore Digital Library |