Recovery of NBTI degradation in HfSiON/metal gate transistors
| Title: | Recovery of NBTI degradation in HfSiON/metal gate transistors |
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| Authors: | Harris, H.R.; Choi, R.; Lee, B.H.; Young, C.D.; Sim, J.H.; Mathews, K.; Zeitzoff, P.; Majhi, P.; Bersuker, G. |
| Source: | IEEE International Integrated Reliability Workshop Final Report, 2004 Integrated reliability workshop Integrated Reliability Workshop Final Report, 2004 IEEE International. :132-135 2004 |
| Relation: | 2004 IEEE International Integrated Reliability Workshop Final Report |
| Database: | IEEE Xplore Digital Library |