Effect of a noble annealing system on nickel silicide formation
| Title: | Effect of a noble annealing system on nickel silicide formation |
|---|---|
| Authors: | Sug-Woo Jung; Hyun-Su Kim; Eun-Ji Jung; Seong-Hwee Cheong; Jong-Ho Yun; Kwan-Jong Roh; Ja-Hum Ku; Gil-Heyun Choi; Sung-Tae Kim; U-In Chung; Joo-Tae Moon; Byung-Il Ryu |
| Source: | 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004. Advanced thermal processing of semiconductors Advanced Thermal Processing of Semiconductors, 2004. RTP 2004. 12th IEEE International Conference on. :121-124 2004 |
| Relation: | 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors |
| Database: | IEEE Xplore Digital Library |