| Title: |
Vertically integrated silicon single crystalline MEMS switch |
| Authors: |
Aharon, O.; Feldman, S.; Nemirovsky, Y. |
| Source: |
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Solid-State Sensors, Actuators and Microsystems Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on. 1:1047-1050 Vol. 1 2005 |
| Relation: |
TRANSDUCERS '05. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers |
| Database: |
IEEE Xplore Digital Library |