| Title: |
In-process gap reduction of capacitive transducers |
| Authors: |
Reuter, D.; Bertz, A.; Billep, D.; Scheibner, D.; Buschnakowski, S.; Dotzel, W.; Gessner, T. |
| Source: |
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Solid-State Sensors, Actuators and Microsystems Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on. 2:1358-1361 Vol. 2 2005 |
| Relation: |
TRANSDUCERS '05. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers |
| Database: |
IEEE Xplore Digital Library |