Gate Length Scaling in High fMAX Si/SiGe n-MODFET
| Title: | Gate Length Scaling in High fMAX Si/SiGe n-MODFET |
|---|---|
| Authors: | Anie, F.; Enciso-Aguilar, M.; Crozat, P.; Adde, R.; Hackbarth, T.; Seiler, U.; Herzog, H.-J.; Konig, U.; von Kanel, H. |
| Source: | 32nd European Solid-State Device Research Conference Solid-State Device Research Conference, 2002. Proceeding of the 32nd European. :167-170 2002 |
| Relation: | 32nd European Solid-State Device Research Conference |
| Database: | IEEE Xplore Digital Library |