Capacitive humidity sensors based on oxidized PhotoBCB polymer films: enhanced sensitivity and response time
| Title: | Capacitive humidity sensors based on oxidized PhotoBCB polymer films: enhanced sensitivity and response time |
|---|---|
| Authors: | Tetelin, A.; Pellet, C.; Achen, A.; Toepper, M. |
| Source: | IEEE Sensors, 2005. Sensors Sensors, 2005 IEEE. :4 pp. 2005 |
| Relation: | 2005 IEEE Sensors |
| Database: | IEEE Xplore Digital Library |