Direct Observation of 2-D Dopant Profiles of MOSFETs Activated by Millisecond Anneal
| Title: | Direct Observation of 2-D Dopant Profiles of MOSFETs Activated by Millisecond Anneal |
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| Authors: | Adachi, K.; Ohuchi, K.; Aoki, N.; Tanimoto, H.; Tsujii, H.; Eyben, P.; Vanhaeren, D.; Vandervorst, W.; Ishimaru, K.; Ishiuchi, H. |
| Source: | 2006 International Workshop on Junction Technology Junction Technology, 2006. IWJT '06. International Workshop on. :104-107 2006 |
| Relation: | 2006 International Workshop on Junction Technology |
| Database: | IEEE Xplore Digital Library |