| Title: |
Aerosol deposition and combined dry/wet etching techniques for fabrication of InP-based quantum dot structures |
| Authors: |
Maximov, I.; Gustafsson, A.; Hansson, H.-C.; Samuelson, L.; Seifert, W.; Wiedensohler, A. |
| Source: |
1993 (5th) International Conference on Indium Phosphide and Related Materials Indium phosphide and related materials Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on. :727-730 1993 |
| Relation: |
1993 (5th) International Conference on Indium Phosphide and Related Materials |
| Database: |
IEEE Xplore Digital Library |