| Title: |
FUSI Specific Yield Monitoring Enabling Improved Circuit Performance and Fast Feedback to Production |
| Authors: |
Chiarella, T.; Rosmeulen, M.; Tigelaar, H.; Kerner, C.; Nackaerts, A.; Ramos, J.; Lauwers, A.; Veloso, A.; Jurczak, M.; Rothschild, A.; Witters, L.; Yu, H.; Kittl, J. A.; Verbeeck, R.; de Potter, M.; Debusschere, I.; Absil, P.; Biesemans, S.; Hoffmann, T. |
| Source: |
2007 IEEE International Conference on Microelectronic Test Structures Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on. :33-36 Mar, 2007 |
| Relation: |
2007 IEEE International Conference on Microelectronic Test Structures |
| Database: |
IEEE Xplore Digital Library |