Achieving 9ps unloaded ring oscillator delay in FuSI/HfSiON with 0.8 nm EOT
| Title: | Achieving 9ps unloaded ring oscillator delay in FuSI/HfSiON with 0.8 nm EOT |
|---|---|
| Authors: | Rothschild, A.; Shi, X.; Everaert, J. L.; Kerner, C.; Chiarella, T.; Hoffmann, T.; Vrancken, C.; Shickova, A.; Yoshinao, H.; Mitsuhashi, R.; Niwa, M.; Lauwers, A.; Veloso, A.; Kittl, J.; Absil, P.; Biesemans, S. |
| Source: | 2007 IEEE Symposium on VLSI Technology VLSI Technology, 2007 IEEE Symposium on. :198-199 Jun, 2007 |
| Relation: | 2007 IEEE Symposium on VLSI Technology |
| Database: | IEEE Xplore Digital Library |