Lumped modeling of a novel RF MEMS double-disk resonator system
| Title: | Lumped modeling of a novel RF MEMS double-disk resonator system |
|---|---|
| Authors: | Grinde, C.; Nygaard, K.H.; Due-Hansen, J.; Fjeldly, T. A. |
| Source: | 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on. :14-18 Apr, 2009 |
| Relation: | 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (MEMS/MOEMS) |
| Database: | IEEE Xplore Digital Library |