| Title: |
Mobility reduction and reliability assessment of high-k/metal gate stacks in deep sub-nanometer EOT region |
| Authors: |
Heh, Dawei; Bersuker, Gennadi; Huang, Jeff; Kirsch, Paul D.; Tseng, Hsing-Huang; Jammy, Raj |
| Source: |
2009 Proceedings of the European Solid State Device Research Conference Solid State Device Research Conference, 2009. ESSDERC '09. Proceedings of the European. :257-260 Sep, 2009 |
| Relation: |
2009 Proceedings of the European Solid State Device Research Conference (ESSDERC) |
| Database: |
IEEE Xplore Digital Library |