Fabrication of 24-MHz-Disk Resonators With Silicon Passive Integration Technology
| Title: | Fabrication of 24-MHz-Disk Resonators With Silicon Passive Integration Technology |
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| Authors: | Sworowski, M.; Neuilly, F.; Legrand, B.; Summanwar, A.; Philippe, P.; Buchaillot, L. |
| Source: | IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 31(1):23-25 Jan, 2010 |
| Database: | IEEE Xplore Digital Library |