Diffusion of Boron in Polycrystalline Silicon
| Title: | Diffusion of Boron in Polycrystalline Silicon |
|---|---|
| Authors: | Nedelec, S.; Mathiot, D.; Gauneau, M. |
| Source: | ESSDERC '96: Proceedings of the 26th European Solid State Device Research Conference Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European. :153-156 Sep, 1996 |
| Relation: | Proceedings of the 26th European Solid State Device Research Conference |
| Database: | IEEE Xplore Digital Library |