| Title: |
Yield enhancement through new solutions for queue time containment |
| Authors: |
Favre, Arnaud; Bounouar, Julien; Rioufrays, Sylvain; Andre, Sandrine; Courouble, Kristell; Decamps, Pascal; Rojat, Marilyn; Houe, Jean-Francois; Trenteseaux, Frederique |
| Source: |
2008 International Symposium on Semiconductor Manufacturing (ISSM) Semiconductor Manufacturing (ISSM), 2008 International Symposium on. :255-257 Oct, 2008 |
| Relation: |
2008 IEEE International Symposium on Semiconductor Manufacturing (ISSM) |
| Database: |
IEEE Xplore Digital Library |