| Title: |
Polysilicon-filled carbon nanotube grass structural material for micromechanical resonators |
| Authors: |
Li, Wei-Chang; Jiang, Yingqi; Schneider, Robert A.; Barrow, Henry G.; Lin, Liwei; Nguyen, Clark T.-C. |
| Source: |
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :477-480 Jan, 2011 |
| Relation: |
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |