High-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip–Tilt-Piston Capability
| Title: | High-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip–Tilt-Piston Capability |
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| Authors: | Jia, K.; Samuelson, S. R.; Xie, H. |
| Source: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 20(3):573-582 Jun, 2011 |
| Database: | IEEE Xplore Digital Library |