High productivity multiple DUT CV test for MEMS microphone wafer with automatic correction
| Title: | High productivity multiple DUT CV test for MEMS microphone wafer with automatic correction |
|---|---|
| Authors: | Inuzuka, Shin |
| Source: | 2010 International Symposium on Semiconductor Manufacturing (ISSM) Semiconductor Manufacturing (ISSM), 2010 International Symposium on. :1-4 Oct, 2010 |
| Relation: | 2010 International Symposium on Semiconductor Manufacturing (ISSM) |
| Database: | IEEE Xplore Digital Library |