| Title: |
The Applied Materials xRLEAP ion implanter for ultra shallow junction formation |
| Authors: |
England, J.; Joyce, L.; Burgess, C.; Moffatt, S.; Foad, M.; Armour, D.; Current, M. |
| Source: |
Proceedings of 11th International Conference on Ion Implantation Technology Ion implantation technology Ion Implantation Technology. Proceedings of the 11th International Conference on. :470-473 1996 |
| Relation: |
Proceedings of 11th International Conference on Ion Implantation Technology |
| Database: |
IEEE Xplore Digital Library |