| Title: |
TED of boron in presence of EOR defects: the role of the evolution of Si self-interstitial supersaturation between the loops |
| Authors: |
Bonafos, C.; de Mauduit, B.; Omri, M.; BenAssayag, G.; Claverie, A.; Alquier, D.; Martinez, A.; Mathiot, D. |
| Source: |
Proceedings of 11th International Conference on Ion Implantation Technology Ion implantation technology Ion Implantation Technology. Proceedings of the 11th International Conference on. :622-625 1996 |
| Relation: |
Proceedings of 11th International Conference on Ion Implantation Technology |
| Database: |
IEEE Xplore Digital Library |