FBAR resonator figure of merit improvements
| Title: | FBAR resonator figure of merit improvements |
|---|---|
| Authors: | Wang, Yaqiang; Feng, Chris; Lamers, Tina; Feld, Dave; Bradley, Paul; Ruby, Rich |
| Source: | 2010 IEEE International Ultrasonics Symposium Ultrasonics Symposium (IUS), 2010 IEEE. :861-863 Oct, 2010 |
| Relation: | 2010 IEEE Ultrasonics Symposium (IUS) |
| Database: | IEEE Xplore Digital Library |