Sensing mobility mismatch due to local interconnect mechanical stress in CMOS technology
| Title: | Sensing mobility mismatch due to local interconnect mechanical stress in CMOS technology |
|---|---|
| Authors: | Blayac, Sylvain; Rivero, Christian; Fornara, Pascal; Lopez, Laurent; Demange, Nicolas |
| Source: | 2011 IEEE ICMTS International Conference on Microelectronic Test Structures Microelectronic Test Structures (ICMTS), 2011 IEEE International Conference on. :201-204 Apr, 2011 |
| Relation: | 2011 International Conference on Microelectronic Test Structures (ICMTS) |
| Database: | IEEE Xplore Digital Library |