Preparation and Optical properties of AlN films using self-prepared AlN target
| Title: | Preparation and Optical properties of AlN films using self-prepared AlN target |
|---|---|
| Authors: | Tianshi Shi; Feng Gu; Linjun Wang; Yue Shen |
| Source: | 16th Opto-Electronics and Communications Conference Opto-Electronics and Communications Conference (OECC), 2011 16th. :731-732 Jul, 2011 |
| Relation: | 2011 16th Opto-Electronics and Communications Conference (OECC) |
| Database: | IEEE Xplore Digital Library |