High speed replication of sub-micron features on large areas by X-ray lithography
| Title: | High speed replication of sub-micron features on large areas by X-ray lithography |
|---|---|
| Authors: | Maydan, D.; Coquin, G. A.; Maldonado, J. R.; Somekh, S.; Lou, D. Y.; Taylor, G. N. |
| Source: | 1974 International Electron Devices Meeting (IEDM) IEDM Tech. Dig. Electron Devices Meeting (IEDM), 1974 International. :18-20 Dec, 1974 |
| Relation: | 1974 International Electron Devices Meeting (IEDM) |
| Database: | IEEE Xplore Digital Library |