Dual mode cMUTs fabricated with LPCVD sacrificial release process
| Title: | Dual mode cMUTs fabricated with LPCVD sacrificial release process |
|---|---|
| Authors: | Certon, Dominique; Senegond, Nicolas; Gross, Dominique; Legros, Mathieu; Boulme, Audren; Roman, Benoit; Teston, Franck; Ferin, Guillaume |
| Source: | 2011 IEEE International Ultrasonics Symposium Ultrasonics Symposium (IUS), 2011 IEEE International. :604-607 Oct, 2011 |
| Relation: | 2011 IEEE International Ultrasonics Symposium (IUS) |
| Database: | IEEE Xplore Digital Library |