Simulation of plasma treatment of uneven substrates in magnetic field
| Title: | Simulation of plasma treatment of uneven substrates in magnetic field |
|---|---|
| Authors: | Ibehej, Tomas; Hruby, Vojtech; Hrach, Rudolf |
| Source: | 2012 Abstracts IEEE International Conference on Plasma Science Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on. :3P-27-3P-27 Jul, 2012 |
| Relation: | 2012 IEEE 39th International Conference on Plasma Sciences (ICOPS) |
| Database: | IEEE Xplore Digital Library |