| Title: |
Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition |
| Authors: |
Purkl, Fabian; English, Tim; Yama, Gary; Provine, J; Samarao, Ashwin K.; Feyh, Ando; O'Brien, Gary; Ambacher, Oliver; Howe, Roger T.; Kenny, Thomas W. |
| Source: |
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on. :185-188 Jan, 2013 |
| Relation: |
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |