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Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers

Title: Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
Authors: Purkl, Fabian; English, Timothy S.; Yama, Gary; Provine, John; Samarao, Ashwin K.; Feyh, Ando; Kim, Bongsang; O'Brien, Gary; Ambacher, Oliver; Howe, Roger T.; Kenny, Thomas W.
Source: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on. :1507-1510 Jun, 2013
Relation: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
Database: IEEE Xplore Digital Library