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Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments

Title: Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments
Authors: Pal, S.; Samuelson, S. R.; Zhang, X.; Xie, H.
Source: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on. :1587-1590 Jun, 2013
Relation: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
Database: IEEE Xplore Digital Library