| Title: |
Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach |
| Authors: |
Fisicaro, G.; Pelaz, L.; Aboy, M.; Lopez, P.; Italia, M.; Huet, K.; Cristiano, F.; Essa, Z.; Yang, Q.; Bedel-Pereira, E.; Hackenberg, M.; Pichler, P.; Quillec, M.; Taleb, N.; Magna, A. La |
| Source: |
2013 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) Simulation of Semiconductor Processes and Devices (SISPAD), 2013 International Conference on. :33-36 Sep, 2013 |
| Relation: |
2013 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) |
| Database: |
IEEE Xplore Digital Library |