A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications
| Title: | A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications |
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| Authors: | Samuelson, S. R.; Xie, H. |
| Source: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 23(1):39-49 Feb, 2014 |
| Database: | IEEE Xplore Digital Library |