Reliability of nanocrystalline diamond MEMS capacitive switches
| Title: | Reliability of nanocrystalline diamond MEMS capacitive switches |
|---|---|
| Authors: | Michalas, L.; Saada, S.; Koutsoureli, M.; Mer, C.; Leuliet, A.; Martins, P.; Bansropun, S.; Papaioannou, G.; Bergonzo, P.; Ziaei, A. |
| Source: | 2013 European Microwave Integrated Circuit Conference Microwave Integrated Circuits Conference (EuMIC), 2013 European. :364-367 Oct, 2013 |
| Relation: | 2013 European Microwave Integrated Circuit Conference (EuMIC) |
| Database: | IEEE Xplore Digital Library |