| Title: |
Stable charge-biased capacitive resonators with encapsulated switches |
| Authors: |
Ng, Eldwin J.; Harrison, Kimberly L.; Everhart, Camille L.; Hong, Vu A.; Yang, Yushi; Ahn, Chae Hyuck; Heinz, David B.; Howe, Roger T.; Kenny, Thomas W. |
| Source: |
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on. :1277-1280 Jan, 2014 |
| Relation: |
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |