Feasibility Evaluation of Virtual Metrology for the Example of a Trench Etch Process
| Title: | Feasibility Evaluation of Virtual Metrology for the Example of a Trench Etch Process |
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| Authors: | Roeder, G.; Winzer, S.; Schellenberger, M.; Jank, S.; Pfitzner, L. |
| Source: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 27(3):327-334 Aug, 2014 |
| Database: | IEEE Xplore Digital Library |