| Title: |
Analytical optimization of the Plasma Clean Cycle for a Nitride PECVD System as evaluated by Cost of Ownership |
| Authors: |
Langan, J.; Sui Yuan Lynn; Huling, B.; Morgan, R.; Anderson, B.; Behnke, J.; Berman, M.; Kobessi, H. |
| Source: |
Proceedings. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI. :229-231 1993 |
| Relation: |
Proceedings IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| Database: |
IEEE Xplore Digital Library |