| Title: |
Synchrotron based in situ characterization during atomic layer deposition |
| Authors: |
Dendooven, J.; Devloo-Casier, K.; Coati, A.; Portale, G.; Bras, W.; Ludwig, K.; Detavernier, C. |
| Source: |
2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on. :1-4 Oct, 2014 |
| Relation: |
2014 IEEE 12th International Conference on Solid -State and Integrated Circuit Technology (ICSICT) |
| Database: |
IEEE Xplore Digital Library |