| Title: |
Composite attribute method and software to interlock semiconductor product design and manufacturing yield |
| Authors: |
Bickford, Jeanne P.; Rolfing, Lori; Sullivan, Candance; They, Carlos; Wolf, Edward M.; Yoder, Joseph W.; Niekrewicz, Paul |
| Source: |
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual SEMI. :416-420 May, 2015 |
| Relation: |
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: |
IEEE Xplore Digital Library |